May, Gray S. Sze, Simon M.
Fundamentals of semiconductor fabrication / by] Gary S.May, Simon M.Sze - Singapore John Wiley & Sons (Asia) 2004 - xiii, 305 p.
Includes appendixes and index
981253072X
Semiconductors-Design and construction
621.38152 / MAY
Fundamentals of semiconductor fabrication / by] Gary S.May, Simon M.Sze - Singapore John Wiley & Sons (Asia) 2004 - xiii, 305 p.
Includes appendixes and index
981253072X
Semiconductors-Design and construction
621.38152 / MAY