Campbell, Stephen A.
The Science and engineering of microelectronic fabrication /Stephen A.Campbel - 2nd ed. - New York Oxford University Press 2001 - xiv, 603 p.
Includes appendex and index.
195136055
Electronic engineering
621.381 / CAM
The Science and engineering of microelectronic fabrication /Stephen A.Campbel - 2nd ed. - New York Oxford University Press 2001 - xiv, 603 p.
Includes appendex and index.
195136055
Electronic engineering
621.381 / CAM