Fundamentals of microfabrication / Marc Madou
By: Madou, Marc.
Publisher: Boca Raton CRC Press 1997Description: 592 p.ISBN: 849394511.Subject(s): Semiconductors | Microelectronics-design and construction
| Lasers-Industrial applications | MicrofabricationDDC classification: 621.38152
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Engineering Library Science & Technology | R | 621.38152 MAD (Browse shelf) | Available | ENG | 244774 |
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| 621.3815 TOK Digital electronics | 621.3815 TRO PSpice for basic microelectronics/ | 621.38152 KEL Low-Dimensional semiconductors : materials, physics, technology, devices | 621.38152 MAD Fundamentals of microfabrication | 621.38152 MAY Fundamentals of semiconductor fabrication | 621.38152 NAT Application specific analog products-Databook: 1995 edition | 621.38152 NAT Data acquisition: databook |
Includes references and index
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