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Plasma electronics : applications in microelectronic device fabrication /T.Makabe, Z.Petrovic

Series: Series in plasma physics. Publisher: New York Taylor & Francis 2006Description: 338 p.ISBN: 750309768.Subject(s): Plasma engineering | Electronic books

DDC classification: 621.044

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Item type	Current location	Collection	Call number	Status	Date due	Barcode
Books in Stacks (S)	Engineering Library Science & Technology	S	621.044 MAK (Browse shelf)	Available		255585

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Previous	621.042 TIW Energy management information system	621.042 WOR Renewable energy, technology, innovation and the environment: World Renewable En	621.044 HAN Handbook of advanced plasma processing techniques	621.044 MAK Plasma electronics : applications in microelectronic device fabrication	621.076 LIN Practice problems for the mechanical engineering PE Exam : a companion to the mechanical engineering reference manual	621.1 AQU Aqueous systems at elevated temperatures and pressures : physical chemistry in water, steam and hydrothermal solutions	621.1 KOV அடிப்படை இயந்திரவியல்	Next

Includes index.

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