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An introduction to surface-micromachining / Robert W. Johnstone; M.Parameswaran

By: Johnstone, Robert W | Parameswaran, M.
Publisher: Boston Kluwer Academic publishers 2004Description: x, 186 p.ISBN: 1402080204.Subject(s): Engineering | Mechanical engineering | Computer engineering | Systems engineeringDDC classification: 621.3815
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