Tribology in chemical-mechanical planarization /Hong Liang, David Craven
By: Liang, Hong | Craven, David.
Publisher: Boca Raton Taylor 7 Francis 2005Description: 185p.ISBN: 824725670.Subject(s): TribologyDDC classification: 621.92| Item type | Current location | Collection | Call number | Status | Date due | Barcode |
|---|---|---|---|---|---|---|
Books in Stacks (S)
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Engineering Library Science & Technology | S | 621.92 LIA (Browse shelf) | Available | 256003 |
Includex Reference and Index
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