Gad-el-Hak, Mohamed., ed. <br/><br/>
MEMS: design and fabrication 

 - 2nd ed. 
 - Boca Raton  Taylor & Francis  2006 
 - variged pagings. 
<br/><br/><label>ISBN: </label>849391385 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microfabrication
<br/><br/><label>Dewey Class. No.: </label>621.381  / MIC