Zetterling, Carl-Mikael., ed. Process technology for silicon carbide devices / (ed. by) Carl-Mikael Zetterling - London INSPEC 2002 - xxi, 176 p. Includes appendix, references and index. ISBN: 852969988 Subjects--Topical Terms: Silicon carbide-electric properties Dewey Class. No.: 621.38152 / PRO