Johnstone, Robert W. Parameswaran, M. <br/><br/>
An introduction to surface-micromachining 
/ Robert W. Johnstone; M.Parameswaran 
 - Boston  Kluwer Academic publishers  2004 
 - x, 186 p. 
<br/><br/><label>ISBN: </label>1402080204 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Engineering<br/> Mechanical engineering<br/> Computer engineering<br/>Systems engineering
<br/><br/><label>Dewey Class. No.: </label>621.3815  / JOH