Bachmann, Klaus J. <br/><br/>
The materials science of microelectronics 
/by Klaus J.Bachmann 
 - New York  VCH  1995 
 - viii, 541 p. 
<br/><br/>   Includes appendixes and index. 
<br/><br/><label>ISBN: </label>895732807 
<br/><br/><label>Dewey Class. No.: </label>621.381  / BAC