The mems handbook  : applications 
/Edited by Mohamed Gad-el-Hak 
 - London  Boca Raton  2006 
 - veriable pages 
<br/><br/> ncludes index 
<br/><br/><label>ISBN: </label>849391393 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems<br/>Detectors<br/> Microactuators
<br/><br/><label>Dewey Class. No.: </label>621.381  / MEM