Campbell, Stephen A. <br/><br/>
The Science and engineering of microelectronic fabrication 
/Stephen A.Campbel 
 - 2nd ed. 
 - New York  Oxford University Press  2001 
 - xiv, 603 p. 
<br/><br/>  <br/>Includes appendex and index. 
<br/><br/><label>ISBN: </label>195136055 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electronic engineering
<br/><br/><label>Dewey Class. No.: </label>621.381  / CAM