Wasa, Kiyotaka Kitabatake, Makoto Adachi, Hideaki <br/><br/>
Thin films material technology  : sputtering of compound materials 
/ Kiyotaka Wasa, Makoto Kitabatake and Hideaki Adachi 
 - New York  William Andrew  2004 
 - xiv, 518 p. 
<br/><br/> Includes appendix and index 
<br/><br/><label>ISBN: </label>815514832 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Sputtering
<br/><br/><label>Dewey Class. No.: </label>620.11  / WAS