Jones, Anthony C., ed. Hitchman, Michael L., ed. <br/><br/>
Chemical vapour deposition: precursors, processes and applications 

 - Cambridge  Royal Society of Chemistry  2009 
 - xv, 582 p. 
<br/><br/> Includes index. 
<br/><br/><label>ISBN: </label>9780854044658 
<br/><br/><label>Dewey Class. No.: </label>620.11  / CHE