Thin films material technology : sputtering of compound materials / Kiyotaka Wasa, Makoto Kitabatake and Hideaki Adachi
By: Wasa, Kiyotaka | Kitabatake, Makoto | Adachi, Hideaki.
Publisher: New York William Andrew 2004Description: xiv, 518 p.ISBN: 815514832.Subject(s): SputteringDDC classification: 620.11| Item type | Current location | Collection | Call number | Status | Date due | Barcode |
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Books in Stacks (S)
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Engineering Library Science & Technology | S | 620.11 WAS (Browse shelf) | Available | 250998 | |
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Books in Stacks (S)
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Engineering Library Science & Technology | S | 620.11 WAS (Browse shelf) | Available | 250997 |
Includes appendix and index
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