Fundamentals of microfabrication / Marc Madou
By: Madou, Marc.
Publisher: Boca Raton CRC Press 1997Description: 592 p.ISBN: 849394511.Subject(s): Semiconductors | Microelectronics-design and construction | Lasers-Industrial applications | MicrofabricationDDC classification: 621.38152Item type | Current location | Collection | Call number | Status | Notes | Date due | Barcode |
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Books in Reference (R) | Engineering Library Science & Technology | R | 621.38152 MAD (Browse shelf) | Available | ENG | 244774 |
Includes references and index
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