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1. Fundamentals of microfabrication / Marc Madou

by Madou, Marc.

Publisher: Boca Raton CRC Press 1997Availability: Items available for loan: Engineering Library [Call number: 621.38152 MAD] (1).

2. MEMS: design and fabrication

by Gad-el-Hak, Mohamed., ed.

Edition: 2nd ed.Publisher: Boca Raton Taylor & Francis 2006Availability: Items available for loan: Technology Library [Call number: 621.381 MIC] (1).

3. Microfabricated power generation devices: design and technology

by Mitsos, Alexander., ed.

Publisher: Weinheim Wiley-VCH Verlag GmbH 2009Availability: Items available for loan: Technology Library [Call number: 621.313 MIC] (1).

4. Transport in laser microfabrication / Costas P. Grigoropoulos : fundamentals and applications

by Grigoropoulos, Costas P.

Publisher: Cambridge Cambridge University Press 2009Availability: Items available for loan: Engineering Library [Call number: 621.366 GRI] (1).

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