| 000 | 00591nam a2200205Ia 4500 | ||
|---|---|---|---|
| 999 |
_c17282 _d17282 |
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| 005 | 20230123110259.0 | ||
| 008 | 180712s9999 xx 000 0 und d | ||
| 020 | _a981253072X | ||
| 041 | _aEN | ||
| 082 |
_a621.38152 _bMAY _223 |
||
| 100 | _aMay, Gray S. | ||
| 100 | _aSze, Simon M. | ||
| 245 |
_aFundamentals of semiconductor fabrication _c/ by] Gary S.May, Simon M.Sze |
||
| 260 |
_aSingapore _bJohn Wiley & Sons (Asia) _c2004 |
||
| 300 | _axiii, 305 p. | ||
| 500 | _aIncludes appendixes and index | ||
| 509 | _aNS | ||
| 650 | _aSemiconductors-Design and construction | ||
| 942 | _cR | ||