| 000 | 00644nam a2200181Ia 4500 | ||
|---|---|---|---|
| 999 |
_c17463 _d17463 |
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| 005 | 20211229151211.0 | ||
| 008 | 180712s9999 xx 000 0 und d | ||
| 020 | _a803126158 | ||
| 082 |
_a621.3815 _bGAT _223 |
||
| 245 |
_aGATE dielectric integrity; material, process, and tool qualification / _cedited by Dinesh C.Gupta., George A.Brown |
||
| 260 |
_aWest conshohocken _bAmerican society for testing and materials _c2000 |
||
| 300 | _a169 p. | ||
| 500 | _aIncludes appendix. | ||
| 650 | _aIntegrated circuits, Dielectrics, Semiconductors | ||
| 700 |
_9119893 _aGupta, Dinesh C. _eedt |
||
| 700 |
_9119894 _aBrown, George A. _eedt |
||
| 942 | _cS | ||