000 | 00520nam a2200193Ia 4500 | ||
---|---|---|---|
999 |
_c26952 _d26952 |
||
005 | 20201230151400.0 | ||
008 | 180712s9999 xx 000 0 und d | ||
020 | _a72393912 | ||
041 | _aEN | ||
082 |
_a621.381 _bHSU _223 |
||
100 | _aHsu, Tai-Ran | ||
245 |
_aMems & Mictosystems _c/by Tai-Ran Hsu _b: design and manufacture |
||
260 |
_aBoston _bMcGraw-hill _c2002 |
||
300 | _axii, 436 p. | ||
500 | _aIncludes bibliographical references and index. | ||
509 | _aNS | ||
650 | _aElectronics | ||
942 | _cR |