| 000 | 00556nam a2200205Ia 4500 | ||
|---|---|---|---|
| 999 |
_c26953 _d26953 |
||
| 005 | 20201230151548.0 | ||
| 008 | 180712s9999 xx 000 0 und d | ||
| 020 | _a1580535364 | ||
| 041 | _aEN | ||
| 082 |
_a681.2 _bMEM _223 |
||
| 100 | _aBeeby, Stephen... [et.al.] | ||
| 245 |
_aMems mechanical sensors _c/by Stephen Beeby... [et.al.] |
||
| 260 |
_aBoston _bAetech House _c2004 |
||
| 300 | _aix, 269 p. | ||
| 500 | _aIncludes references and index | ||
| 509 | _aNS | ||
| 650 | _aMicroelectronical system | ||
| 650 | 4 |
_aEngineering _95872 |
|
| 942 | _cR | ||