000			00409nam a2200157Ia 4500
008			180712s9999 xx 000 0 und d
020			_a849391385
082			_a621.381 _bMIC
100			_aGad-el-Hak, Mohamed., ed.
245			_aMEMS: design and fabrication
250			_a2nd ed.
260			_aBoca Raton _bTaylor & Francis _c2006
300			_avariged pagings.
650			_aMicrofabrication
942			_cS
999			_c26954 _d26954