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|---|---|---|---|
| 999 |
_c27350 _d27350 |
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| 005 | 20210101133640.0 | ||
| 008 | 180712s9999 xx 000 0 und d | ||
| 020 | _a780310853 | ||
| 041 | _aEN | ||
| 082 |
_a621.381 _bMIC _223 |
||
| 245 |
_aMicromechanics and mems _b: classic and seminal papers to 1990 _c/edited William S.Trimmer |
||
| 260 |
_aNew York _bInstitute of Electrical and Electronics Engineers _c1997 |
||
| 300 | _axv, 701 p. | ||
| 500 | _aIncludes bibliographical references and index | ||
| 509 | _aNS | ||
| 650 | _aMicroelectronic | ||
| 650 | 4 |
_aElectronic engineering _95666 |
|
| 700 |
_954862 _aTrimmer, William S., ed. _eedt |
||
| 942 | _cR | ||