| 000 | 00499nam a2200193Ia 4500 | ||
|---|---|---|---|
| 999 |
_c32855 _d32855 |
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| 005 | 20200708102129.0 | ||
| 008 | 200708b ||||| |||| 00| 0 eng d | ||
| 020 | _a1402012489 | ||
| 041 | _aEN | ||
| 082 |
_a620.11 _bPRI _223 |
||
| 245 | _aPrinciples of chemical vapor deposition | ||
| 260 |
_aBoston _bKluwer Academic _c2003 |
||
| 300 | _axi, 273 p. | ||
| 500 | _a Includes index. | ||
| 509 | _aNS | ||
| 700 |
_932942 _aDobkin, D.M. _eedt |
||
| 700 |
_992870 _a Zuraw, M.K. _eedt |
||
| 942 | _cS | ||