000			00606nam a2200193Ia 4500
999			_c33462 _d33462
005			20240103115252.0
008			180712s9999 xx 000 0 und d
020			_a852969988
082			_a621.38152 _bPRO _223
100			_aZetterling, Carl-Mikael., ed.
245			_aProcess technology for silicon carbide devices _c/ (ed. by) Carl-Mikael Zetterling
260			_aLondon _bINSPEC _c2002
300			_axxi, 176 p.
500			_aIncludes appendix, references and index.
509			_aNS
650			_aSilicon carbide-electric properties
700			_957583 _aZetterling, Carl-Mikael., ed.
942			_cR