| 000 | 00673nam a2200169Ia 4500 | ||
|---|---|---|---|
| 999 |
_c4112 _d4112 |
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| 005 | 20220126143135.0 | ||
| 008 | 180712s9999 xx 000 0 und d | ||
| 020 | _a883183595 | ||
| 082 |
_a537.532 _bCON _223 |
||
| 100 | _aCONFERENCE on applications of radio-frequency power to plasm | ||
| 245 |
_aApplications of radio-frequency power to plasmas: AIP conference proceedings 159 / _csponsored by the American Physical Society and the U.S.department of energy, May 4-6,1987: edited by S.Bernabei, R.W.Motley |
||
| 260 |
_aNew York _bAmerican Institute of Physics _c1987 |
||
| 300 | _a467 p. | ||
| 500 | _aIncludes index. | ||
| 700 |
_9125727 _a Beranbei, S. _eedt |
||
| 942 | _cS | ||