| 000 | 00481nam a2200181Ia 4500 | ||
|---|---|---|---|
| 999 |
_c43358 _d43358 |
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| 005 | 20220110154457.0 | ||
| 008 | 180712s9999 xx 000 0 und d | ||
| 020 | _a895732807 | ||
| 041 | _aEN | ||
| 082 |
_a621.381 _bBAC _223 |
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| 100 | _aBachmann, Klaus J. | ||
| 245 | 4 |
_aThe materials science of microelectronics _c/by Klaus J.Bachmann |
|
| 260 |
_aNew York _bVCH _c1995 |
||
| 300 | _aviii, 541 p. | ||
| 500 | _a Includes appendixes and index. | ||
| 509 | _aNS | ||
| 942 | _cS | ||