| 000 | 00604nam a2200217Ia 4500 | ||
|---|---|---|---|
| 999 |
_c43416 _d43416 |
||
| 005 | 20210201153447.0 | ||
| 008 | 180712s9999 xx 000 0 und d | ||
| 020 | _a849391393 | ||
| 041 | _aEN | ||
| 082 |
_a621.381 _bMEM _223 |
||
| 245 | 4 |
_aThe mems handbook _c/Edited by Mohamed Gad-el-Hak _b: applications |
|
| 260 |
_aLondon _bBoca Raton _c2006 |
||
| 300 | _averiable pages | ||
| 500 | _ancludes index | ||
| 509 | _aNS | ||
| 650 | _aMicroelectromechanical systems | ||
| 650 | 4 |
_aDetectors _94640 |
|
| 650 | 0 |
_a Microactuators _9102883 |
|
| 700 |
_9102885 _aGad-el-Hak, Mohamed. _eedt |
||
| 942 | _cR | ||