| 000 | 00579nam a2200205Ia 4500 | ||
|---|---|---|---|
| 999 |
_c44758 _d44758 |
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| 005 | 20200724120347.0 | ||
| 008 | 180712s9999 xx 000 0 und d | ||
| 020 | _a195136055 | ||
| 041 | _aEN | ||
| 082 |
_a621.381 _bCAM _223 |
||
| 100 | _aCampbell, Stephen A. | ||
| 245 | 4 |
_aThe Science and engineering of microelectronic fabrication _c/Stephen A.Campbel |
|
| 250 | _a2nd ed. | ||
| 260 |
_aNew York _bOxford University Press _c2001 |
||
| 300 | _axiv, 603 p. | ||
| 500 | _a Includes appendex and index. | ||
| 509 | _aNS | ||
| 650 | _aElectronic engineering | ||
| 942 | _cR | ||