| 000 | 00633nam a2200217Ia 4500 | ||
|---|---|---|---|
| 999 |
_c46117 _d46117 |
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| 005 | 20200708113323.0 | ||
| 008 | 200708b ||||| |||| 00| 0 eng d | ||
| 020 | _a815514832 | ||
| 041 | _aEN | ||
| 082 |
_a620.11 _bWAS _223 |
||
| 100 | _aWasa, Kiyotaka | ||
| 100 | _aKitabatake, Makoto | ||
| 100 | _aAdachi, Hideaki | ||
| 245 |
_aThin films material technology _b: sputtering of compound materials _c/ Kiyotaka Wasa, Makoto Kitabatake and Hideaki Adachi |
||
| 260 |
_aNew York _bWilliam Andrew _c2004 |
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| 300 | _axiv, 518 p. | ||
| 500 | _aIncludes appendix and index | ||
| 509 | _aNS | ||
| 650 | _aSputtering | ||
| 942 | _cS | ||