| 000 | 00600nam a2200205Ia 4500 | ||
|---|---|---|---|
| 999 |
_c7831 _d7831 |
||
| 005 | 20200707114048.0 | ||
| 008 | 180712s9999 xx 000 0 und d | ||
| 020 | _a9780854044658 | ||
| 041 | _aEN | ||
| 082 |
_a620.11 _bCHE _223 |
||
| 100 | _aJones, Anthony C., ed. | ||
| 100 | _a Hitchman, Michael L., ed. | ||
| 245 | _aChemical vapour deposition: precursors, processes and applications | ||
| 260 |
_aCambridge _bRoyal Society of Chemistry _c2009 |
||
| 300 | _axv, 582 p. | ||
| 500 | _aIncludes index. | ||
| 509 | _aNS | ||
| 700 |
_9101763 _a Anthony C Jones, Michael L Hitchman |
||
| 942 | _cS | ||