000 00471nam a2200193Ia 4500
999 _c90203
_d90203
005 20200723141328.0
008 180710s9999 xx 000 0 und d
020 _a256756
041 _aEN
082 _a621.366
_bHOR
_223
100 _aHorn, Alexander
245 _aUltra-fast material metrology
_c/Alexander Horn
260 _aWeinheim
_bWiley-Vch
_c2009
300 _axvi, 206 p.
509 _aNS
650 _aLasers
650 0 _aMetrology
_9102700
942 _cS