GATE dielectric integrity; material, process, and tool qualification /
edited by Dinesh C.Gupta., George A.Brown
- West conshohocken American society for testing and materials 2000
- 169 p.
Includes appendix.
803126158
Integrated circuits, Dielectrics, Semiconductors
621.3815 / GAT
Includes appendix.
803126158
Integrated circuits, Dielectrics, Semiconductors
621.3815 / GAT