| 000 -LEADER |
|---|
| fixed length control field |
00644nam a2200181Ia 4500 |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20211229151211.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
180712s9999 xx 000 0 und d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
803126158 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.3815 |
| Author Mark |
GAT |
| DDC Edition number |
23 |
| 245 ## - TITLE STATEMENT |
|---|
| Title |
GATE dielectric integrity; material, process, and tool qualification / |
| Statement of responsibility, etc. |
edited by Dinesh C.Gupta., George A.Brown |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
West conshohocken |
| Name of publisher, distributor, etc. |
American society for testing and materials |
| Date of publication, distribution, etc. |
2000 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
169 p. |
| 500 ## - GENERAL NOTE |
|---|
| General note |
Includes appendix. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Integrated circuits, Dielectrics, Semiconductors |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| 9 (RLIN) |
119893 |
| Personal name |
Gupta, Dinesh C. |
| Role |
Editor |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| 9 (RLIN) |
119894 |
| Personal name |
Brown, George A. |
| Role |
Editor |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| item type |
Books in Stacks (S) |
