Beeby, Stephen... [et.al.]
Mems mechanical sensors /by Stephen Beeby... [et.al.] - Boston Aetech House 2004 - ix, 269 p.
Includes references and index
1580535364
Microelectronical system
Engineering
681.2 / MEM
Mems mechanical sensors /by Stephen Beeby... [et.al.] - Boston Aetech House 2004 - ix, 269 p.
Includes references and index
1580535364
Microelectronical system
Engineering
681.2 / MEM