Mems mechanical sensors /by Stephen Beeby... [et.al.]
By: Beeby, Stephen... [et.al.].
Publisher: Boston Aetech House 2004Description: ix, 269 p.ISBN: 1580535364.Subject(s): Microelectronical system | EngineeringDDC classification: 681.2Item type | Current location | Collection | Call number | Status | Notes | Date due | Barcode |
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Books in Reference (R) | Engineering Library Science & Technology | R | 681.2 MEM (Browse shelf) | Available | ENG | 244730 |
Includes references and index
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