Micromechanics and mems : classic and seminal papers to 1990
/edited William S.Trimmer
- New York Institute of Electrical and Electronics Engineers 1997
- xv, 701 p.
Includes bibliographical references and index
780310853
Microelectronic
Electronic engineering
621.381 / MIC
Includes bibliographical references and index
780310853
Microelectronic
Electronic engineering
621.381 / MIC