Micromechanics and mems : classic and seminal papers to 1990 /edited William S.Trimmer
Contributor(s): Trimmer, William S., ed [Editor].
Publisher: New York Institute of Electrical and Electronics Engineers 1997Description: xv, 701 p.ISBN: 780310853.Subject(s): Microelectronic | Electronic engineeringDDC classification: 621.381Item type | Current location | Collection | Call number | Status | Date due | Barcode |
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Books in Reference (R) | Engineering Library Science & Technology | R | 621.381 MIC (Browse shelf) | Available | 244740 |
Includes bibliographical references and index
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