GATE dielectric integrity; material, process, and tool qualification / edited by Dinesh C.Gupta., George A.Brown
Contributor(s): Gupta, Dinesh C [Editor]
| Brown, George A [Editor].
Publisher: West conshohocken American society for testing and materials 2000Description: 169 p.ISBN: 803126158.Subject(s): Integrated circuits, Dielectrics, SemiconductorsDDC classification: 621.3815
| Item type | Current location | Call number | Status | Date due | Barcode |
|---|---|---|---|---|---|
Books in Stacks (S)
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Main Library Science & Technology | 621.3815 GAT (Browse shelf) | Available | 147038 |
Includes appendix.
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